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AST 210/EE 213 - Lecture 8: Multilayer applications
Applied Science & Technology 210 / Electrical Engineering 213: Soft X-Rays and Extreme Ultraviolet Radiation
Lecture 8: Multilayer applications
http://www.coe.berkeley.edu/AST/sxreuv/

Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwood's research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography.


[courses] [ee213] [fall2005]
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UC Berkeley
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English
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